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Кинетика процессов осаждения пленок поликремния, легированного кислородом в процессе роста
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Nalivaiko, O. Yu.
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Тurtsevich, A. S.
Published 2012
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Related Subjects
adsorptive-kinetic model
film deposition
polysilicon
адсорбционно-кинетическая модель
поликристаллический кремний
процесс осаждения пленок