Formation of flat surfaces of optoelectronic components in diamond polishing von Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, A. G. Vetrov

Volltext

Efficiency of polishing of anisotropic single-crystal materials for optoelectronics von Ju. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. D. Filatov, A. G. Vetrov

Volltext

Polished surface roughness of optoelectronic components made of monocrystalline materials von Ju. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. D. Filatov, A. G. Vetrov

Volltext

A mechanism of diamond-abrasive finishing of monocrystalline silicon carbide von Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev

Volltext

Precision shaping flat surfaces details of optics and microelectronics when polishing von Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin, A. G. Vetrov

Volltext

Polishing of opto-electronic equipment elements from single-crystal silicon carbide von Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev, V. D. Kurilovich, M. A. Danilchenko, T. A. Prikhna, A. I. Borimskij, A. M. Kutsaj, V. G. Poltoratskij

Volltext