Open Science Harvester of NAS of Ukraine

Formation of flat surfaces of optoelectronic components in diamond polishing

by Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, A. G. Vetrov
Published 2017

Efficiency of polishing of anisotropic single-crystal materials for optoelectronics

by Ju. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. D. Filatov, A. G. Vetrov
Published 2016

Polished surface roughness of optoelectronic components made of monocrystalline materials

by Ju. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. D. Filatov, A. G. Vetrov
Published 2016

A mechanism of diamond-abrasive finishing of monocrystalline silicon carbide

by Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev
Published 2013

Precision shaping flat surfaces details of optics and microelectronics when polishing

by Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin, A. G. Vetrov
Published 2016

Polishing of opto-electronic equipment elements from single-crystal silicon carbide

by Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev, V. D. Kurilovich, M. A. Danilchenko, T. A. Prikhna, A. I. Borimskij, A. M. Kutsaj, V. G. Poltoratskij
Published 2015