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A. N. Stervoedov
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Distribution of chemical composition depth in Cr-O-N films obtained by the method ion-stimulated deposition
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A. N. Stervoedov
Published 2009
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2
Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization
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A. V. Derevjanko
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A. N. Stervoedov
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Ju. Silkin
Published 2008
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Features of X-ray photoelectron spectroscopy for determining the thickness of ultrathin films
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A. N. Stervoedov
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V. M. Beresnev
,
N. V. Sergeeva
Published 2010
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