Distribution of chemical composition depth in Cr-O-N films obtained by the method ion-stimulated deposition von A. N. Stervoedov

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Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization von A. V. Derevjanko, A. N. Stervoedov, Ju. Silkin

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Features of X-ray photoelectron spectroscopy for determining the thickness of ultrathin films von A. N. Stervoedov, V. M. Beresnev, N. V. Sergeeva

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