Open Science Harvester of NAS of Ukraine

Dual model describing effects of evaporated metal gate on low-k dielectric methylsilsesquioxane in metal oxide semiconductor capacitor structure

by Aw, K.C., Ibrahim, K.
Published in Semiconductor Physics Quantum Electronics & Optoelectronics (2003)

Characterization of MOS structure using low-k dielectric methylsilsesquioxane with evaporated and sputtered aluminium gate

by Aw, K.C., Ibrahim, K.
Published in Semiconductor Physics Quantum Electronics & Optoelectronics (2002)