Investigation of the Phase Interfaces in Periodic Multilayer Mo/Si Structures, Using the Method of Mass-Spectrometry of Neutral Particles

за авторством Ju. P. Pershin, V. A. Sevrjukova, E. N. Zubarev, A. S. Oberemok, V. P. Melnik, B. N. Romanjuk, V. G. Popov, P. M. Litvin
Опубліковано 2013