Transformation of SiOx films into nanocomposite SiO₂(Si) films under thermal and laser annealing von Steblova, O.V., Evtukh, A.A., Bratus’, O.I., Fedorenko, L.L., Voitovych, M.V., Lytvyn, O.S., Gavrylyuk, O.O., Semchuk, O.Yu.

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