Method for measuring external and internal parameters of plasma with ungrounded gas discharge electrodes

von Chunadra, А.G., Sereda, К.N., Tarasov, I.K.
Veröffentlicht 2019

Probe measurements of parameters of dense gasmetallic plasma in the inhomogeneous magnetic field of a planar magnetron discharge

von Chunadra, А.G., Sereda, К.N., Tarasov, I.K.
Veröffentlicht in Вопросы атомной науки и техники (2018)

Control of ionization processes in magnetron sputtering system by changing magnetic field configuration

von Chunadra, А.G., Sereda, К.N., Tarasov, I.K., Makhlai, V.A.
Veröffentlicht 2021

Magnetron discharge intensification for effective deposition of coatings from difficult spray metals

von Chunadra, А.G., Sereda, К.N., Tarasov, I.K., Vereshchaka, Y.A.
Veröffentlicht in Вопросы атомной науки и техники (2020)

Features of coatings deposition in combined stationary-pulsed operation mode of the magnetron sputtering system

von Chunadra, А.G., Sereda, К.N., Tarasov, I.K., Bizukov, А.А., Girka, A.I.
Veröffentlicht 2017