Actinometric study of oxygen dissociation in ICP source

за авторством Dakhov, A.N., Dudin, S.V.
Опубліковано 2014

Influence of secondary electron emission on the RF gas breakdown

за авторством Dakhov, A.N., Dudin, S.V.
Опубліковано 2013

Conversion of carbon dioxide in low-pressure plasma

за авторством Dudin, S.V., Dakhov, A.N.
Опубліковано 2018

Investigation of interaction between ion-beam plasma and processed surface during the synthesis of tantalum diboride and pentaoxide

за авторством Yakovin, S., Zykov, A., Dudin, S., Dakhov, A., Yefymenko, N.
Опубліковано 2019

Dependence of RF breakdown curve on electrode geometry in CCP reactor

за авторством Dudin, S.V., Dakhov, A.N., Lisovskiy, V.A., Pletniov, V.M.
Опубліковано 2012

Forming a unipolar pulsed discharge in nitrogen

за авторством Lisovskiy, V.A., Ogloblina, P.A., Dudin, S.V., Yegorenkov, V.D., Dakhov, A.N.
Опубліковано 2016

Formation stages of pulsed discharge in oxygen and carbon tetrafluoride

за авторством Lisovskiy, V.A., Ogloblina, P.A., Dudin, S.V., Yegorenkov, V.D., Dakhov, A.N., Farenik, V.I.
Опубліковано 2016