Influence of secondary electron emission on the RF gas breakdown von Dakhov, A.N., Dudin, S.V.

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Conversion of carbon dioxide in low-pressure plasma von Dudin, S.V., Dakhov, A.N.

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Actinometric study of oxygen dissociation in ICP source von Dakhov, A.N., Dudin, S.V.

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Investigation of interaction between ion-beam plasma and processed surface during the synthesis of tantalum diboride and pentaoxide von Yakovin, S., Zykov, A., Dudin, S., Dakhov, A., Yefymenko, N.

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Dependence of RF breakdown curve on electrode geometry in CCP reactor von Dudin, S.V., Dakhov, A.N., Lisovskiy, V.A., Pletniov, V.M.

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Forming a unipolar pulsed discharge in nitrogen von Lisovskiy, V.A., Ogloblina, P.A., Dudin, S.V., Yegorenkov, V.D., Dakhov, A.N.

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Formation stages of pulsed discharge in oxygen and carbon tetrafluoride von Lisovskiy, V.A., Ogloblina, P.A., Dudin, S.V., Yegorenkov, V.D., Dakhov, A.N., Farenik, V.I.

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