Open Science Harvester of NAS of Ukraine

Influence of secondary electron emission on the RF gas breakdown

by Dakhov, A.N., Dudin, S.V.
Published in Вопросы атомной науки и техники (2013)

Conversion of carbon dioxide in low-pressure plasma

by Dudin, S.V., Dakhov, A.N.
Published in Вопросы атомной науки и техники (2018)

Actinometric study of oxygen dissociation in ICP source

by Dakhov, A.N., Dudin, S.V.
Published in Вопросы атомной науки и техники (2014)

Investigation of interaction between ion-beam plasma and processed surface during the synthesis of tantalum diboride and pentaoxide

by Yakovin, S., Zykov, A., Dudin, S., Dakhov, A., Yefymenko, N.
Published in Вопросы атомной науки и техники (2019)

Dependence of RF breakdown curve on electrode geometry in CCP reactor

by Dudin, S.V., Dakhov, A.N., Lisovskiy, V.A., Pletniov, V.M.
Published in Вопросы атомной науки и техники (2012)

Forming a unipolar pulsed discharge in nitrogen

by Lisovskiy, V.A., Ogloblina, P.A., Dudin, S.V., Yegorenkov, V.D., Dakhov, A.N.
Published in Вопросы атомной науки и техники (2016)

Formation stages of pulsed discharge in oxygen and carbon tetrafluoride

by Lisovskiy, V.A., Ogloblina, P.A., Dudin, S.V., Yegorenkov, V.D., Dakhov, A.N., Farenik, V.I.
Published in Журнал физики и инженерии поверхности (2016)