The flow density of atoms sputtered from a cathode of cylinder magnetron von Panchenko, O.A., Goncharov, A.A., Demchishin, A.V., Kostin, E.G., Pavlov, S.N., Stetsenko, B.V.

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Plasma devices for ion beam and plasma deposition applications von Goncharov, A., Demchishin, A., Dobrovolskiy, A., Kostin, E., Panchenko, O., Pavlov, C., Protsenko, I., Stetsenko, B., Ternovoy, E., Brown, I. G.

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