The investigation of the optical spectra in process of magnetron deposition von Demchishin, A.V., Evsyukov, A.N., Goncharov, A.A., Kostin, E.G.

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The flow density of atoms sputtered from a cathode of cylinder magnetron von Panchenko, O.A., Goncharov, A.A., Demchishin, A.V., Kostin, E.G., Pavlov, S.N., Stetsenko, B.V.

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