Technological aprobation of integral cluster setup for complex compound composites syntesis by Yakovin, S., Dudin, S., Zykov, A., Shyshkov, A., Farenik, V.

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Double magnetron cluster set-up for synthesis of micro and nano structure coatings by Yakovin, S., Zykov, A., Dudin, S., Sergiec, M., Farenik, V.

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The Langmuir probe modeling in ion-beam plasma by Antonova, T.N., Dudin, S.V., Farenik, V.I.

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The energy balance of the asymmetric combined inductive-capacitive RF discharge at low pressure by Zykov, A.V., Polozhiy, K.I., Farenik, V.I.

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Plasma assisted deposition of TaB₂ coatings by magnetron sputtering system by Yakovin, S., Zykov, A., Dudin, S., Farenik, V., Goncharov, A., Shelest, I., Kuznetsov, V.

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Experimental research of ICP reactor for plasma-chemical etching by Dudin, S.V., Zykov, A.V., Dahov, A.N., Farenik, V.I.

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Formation stages of pulsed discharge in oxygen and carbon tetrafluoride by Lisovskiy, V.A., Ogloblina, P.A., Dudin, S.V., Yegorenkov, V.D., Dakhov, A.N., Farenik, V.I.

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