Technological aprobation of integral cluster setup for complex compound composites syntesis by Yakovin, S., Dudin, S., Zykov, A., Shyshkov, A., Farenik, V.

Get full text

Double magnetron cluster set-up for synthesis of micro and nano structure coatings by Yakovin, S., Zykov, A., Dudin, S., Sergiec, M., Farenik, V.

Get full text

The Langmuir probe modeling in ion-beam plasma by Antonova, T.N., Dudin, S.V., Farenik, V.I.

Get full text

The energy balance of the asymmetric combined inductive-capacitive RF discharge at low pressure by Zykov, A.V., Polozhiy, K.I., Farenik, V.I.

Get full text

Spatial distributions of plasma parameters in ICP reactor by Dudin, S.V., Dahov, A.N., Farenik, V.I.

Get full text

Development of arc suppression technique for reactive magnetron sputtering by Dudin, S.V., Farenik, V.I., Dahov, A.N., Walkowicz, J.

Get full text

Plasma assisted deposition of TaB₂ coatings by magnetron sputtering system by Yakovin, S., Zykov, A., Dudin, S., Farenik, V., Goncharov, A., Shelest, I., Kuznetsov, V.

Get full text

Experimental research of ICP reactor for plasma-chemical etching by Dudin, S.V., Zykov, A.V., Dahov, A.N., Farenik, V.I.

Get full text

Integral cluster set-up for complex compound composites syntesis by Yakovin, S.D., Dudin, S.V., Zykov, A.V., Farenik, V.I.

Get full text

Formation stages of pulsed discharge in oxygen and carbon tetrafluoride by Lisovskiy, V.A., Ogloblina, P.A., Dudin, S.V., Yegorenkov, V.D., Dakhov, A.N., Farenik, V.I.

Get full text