Search Results - Farenik, V.I.
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The Langmuir probe modeling in ion-beam plasma by Antonova, T.N., Dudin, S.V., Farenik, V.I.
Published in Вопросы атомной науки и техники (2003)Get full text
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Experimental research of ICP reactor for plasma-chemical etching by Dudin, S.V., Zykov, A.V., Dahov, A.N., Farenik, V.I.
Published in Вопросы атомной науки и техники (2006)Get full text
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