The Langmuir probe modeling in ion-beam plasma von Antonova, T.N., Dudin, S.V., Farenik, V.I.

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The energy balance of the asymmetric combined inductive-capacitive RF discharge at low pressure von Zykov, A.V., Polozhiy, K.I., Farenik, V.I.

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Experimental research of ICP reactor for plasma-chemical etching von Dudin, S.V., Zykov, A.V., Dahov, A.N., Farenik, V.I.

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Formation stages of pulsed discharge in oxygen and carbon tetrafluoride von Lisovskiy, V.A., Ogloblina, P.A., Dudin, S.V., Yegorenkov, V.D., Dakhov, A.N., Farenik, V.I.

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