Hall ion source with ballistic and magnetic beam focusing von Bizyukov, A.A., Girka, A.I., Sereda, K.N., Nazarov, A.V., Romaschenko, E.V.

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Features of coatings deposition in combined stationary-pulsed operation mode of the magnetron sputtering system von Chunadra, А.G., Sereda, К.N., Tarasov, I.K., Bizukov, А.А., Girka, A.I.

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