Study of low-pressure discharge by optical emission spectroscopy by Afanasіeva, I.A., Afanasiev, S.N., Bobkov, V.V., Gritsyna, V.V., Mahotka, I.S., Okseniuk, I.I., Shevchenko, D.I., Skrypnyk, A.O.

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Digital identification of the emission spectrum lines of magnetron discharge by Afanasіeva, I.A., Afanasiev, S.N., Bobkov, V.V., Gritsyna, V.V., Drozdov, D.R., Logachev, Yu.E., Skrypnyk, A.A., Shevchenko, D.I.

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Digital processing of optical emission spectra of magnetron sputtering plasma system by Afanasіeva, I.A., Afanasiev, S.N., Azarenkov, N.A., Bobkov, V.V., Gritsyna, V.V., Logachev, Yu.E., Okseniuk, I.I., Skrypnyk, A.A., Shevchenko, D.I., Chornous, V.M.

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