Mechanism of AlN film formation at thermochemical nitridization of sapphire

за авторством Kaltaev, Kh.Sh.-ogly, Nizhankovskiy, S.V., Sidelnikova, N.S., Rom, M.A., Dan'ko, A.Ya., Dobrotvorskaya, M.V., Belyaev, A.Ye., Strelchuk, V.V., Kolomys, A.F.
Опубліковано 2011