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Прибор и методы измерения параметров и степени однородности пленочных структур
by
Makara, V. A.
,
Odarych, V. A.
,
Kepich, T. Yu.
,
Preobragenskaya, T. D.
,
Rudenko, O. V.
Published 2009
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Related Subjects
ellipsometry
homogeneity control
methods of measuring the film parameters
контроль однородности
методы измерения параметров пленок
эллипсометрия