Measurement of gas-plasma torch temperature

von Klepikov, V.F., Shchelokovskyy, P.A., Kryshtal, P.G., Tolstolutskiy, A.G., Uvarov, V.V.
Veröffentlicht 2001

Deposition of nanocrystalline silicon films into low frequency induction RF discharge

von Deryzemlia, A.M., Kryshtal, P.G., Malykhin, D.G., Radchenko, V.I., Shirokov, B.M.
Veröffentlicht 2014

Hydrogen reduction of silicon tetrachloride in low temperature non-equilibrium plasma of induction RF discharge

von Deryzemlia, A.N., Yevsiukov, A.I., Radchenko, V.I., Khizhnyak, D.A., Kryshtal, P.G., Zhuravlov, A.Yu., Shijan, A.V., Strigunovskiy, S.V., Pelypets, Yu.A., Shirokov, B.M.
Veröffentlicht 2019