Ion–plasma deposition of the nanostructured multicom-ponent coatings on thermolabile materials von L. S. Osipov, Ju. Polotskij, S. A. Bespalov, M. S. Snitsar, V. I. Nevmerzhitskij

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Formation of Nanostructured Relief of TiN—Fe Heterostructures in Hybrid Helicon-Arc Plasma Reactor von E. M. Rudenko, I. V. Korotash, D. Y. Polotskiy, L. S. Osipov, M. V. Dyakin, T. A. Prikhna, A. P. Shapovalov

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Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique von A. P. Shapovalov, I. V. Korotash, E. M. Rudenko, F. F. Sizov, D. S. Dubyna, L. S. Osipov, Yu. Polotskiy, Z. F. Tsybrii, A. A. Korchovyi

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