Markku Leskelä

Markku Leskelä was the leader of the [http://www.aldcoe.fi/ Finnish Centre of Excellence in ALD] (2012-2017) by the University of Helsinki and VTT Technical Research Centre of Finland.
Markku Leskelä started ALD research (then called atomic layer epitaxy) in the early 1980s at Helsinki University of Technology (nowadays Aalto University) with Prof. Lauri Niinistö. In 2012, he received the ALD Innovation Prize at the international ALD conference. Provided by Wikipedia
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1by Shvydenko, Kostiantyn V., Grafova, Iryna A., Shvydenko, Tetiana I., Kostyuk, Aleksandr N., Picanço, Neila S., Silva, Luiz F.R., Kropfitsch, Anya, Wyrepkowski, Claudia D.C., Zerbini, Luiz F., Tadei, Wanderli P., Pereira, Antonia M.R.F., Leskelä, Markku, Grafov, Andriy V.Get full text
Published 2022
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