Fabrication of silicon grating structures using interference lithography and chalcogenide inorganic photoresist by Min’ko, V.I., Shepeliavyi, P.E., Indutnyy, I.Z., Litvin, O.S.

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Photostimulated etching of germanium chalcogenide films by Dan’ko, V.A., Indutnyi, I.Z., Myn’ko, V.I., Shepeliavyi, P.E., Lukyanyuk, M.V., Litvin, O.S.

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