Search Results - Logachev, Yu. E.
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Digital processing of optical emission spectra of magnetron sputtering plasma system by Afanasіeva, I.A., Afanasiev, S.N., Azarenkov, N.A., Bobkov, V.V., Gritsyna, V.V., Logachev, Yu.E., Okseniuk, I.I., Skrypnyk, A.A., Shevchenko, D.I., Chornous, V.M.
Published in Вопросы атомной науки и техники (2019)Get full text
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