The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma von V. V. Vasilev, A. A. Luchaninov, E. N. Reshetnjak, V. E. Strelnitskij, G. N. Tolmacheva, G. A. Pribytkov, A. V. Gurskikh, M. G. Krinitsyn

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