Effect of chemical and radiofrequency plasma treatment on photoluminescence of SiOx films

von Indutnyy, I.Z., Lysenko, V.S., Min'ko, V.I., Nazarov, A.N., Tkachenko, A.S., Shepeliavyi, P.E., Dan'ko, V.A., Maidanchuk, I.Yu.
Veröffentlicht 2006