Open Science Harvester of NAS of Ukraine

Ion energy and angular distributions in RF capacitively coupled plasma sources

by Manuilenko, O.V., Minaeva, K.M.
Published in Вопросы атомной науки и техники (2006)

Ion energy and ion angular distributions in RF capacitively coupled plasma sources: pure argon and argon-oxygen mixtures

by Manuilenko, O.V., Minaeva, K.M., Golota, V.I.
Published in Вопросы атомной науки и техники (2006)