Microprocessor OCM-003 device for ozone concentration measuring von Gubarev, S.P., Opaleva, G.P., Taran, V.S., Zolototrubova, M.I., Nezovibat’ko, Y.N.

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Some aspects of deposition of conductive, dielectric and protective coatings on insulators with using arc discharge dc and RF bias von Taran, V.S., Muratov, R.M., Nezovibat'ko, Y.N., Leonovych, A.V., Sergiiets, M.A.

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Hardware-software complex for automated control and monitoring of the vacuum system of the coating setup "Bulat-6" von Gubarev, S.P., Leonovych, A.V., Muratov, R.M., Nezovibat'ko, Y.N., Opaleva, G.P., Taran, V.S., Zolototrubova, M.I.

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