Influence of conditions of deposition and annealing on a nanohardness of amorphous Si–C–N films by O. K. Porada

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Hard plasmachemical a-SiCN coatings by O. K. Porada, A. O. Kozak, V. I. Ivashchenko, S. M. Dub, H. M. Tolmacheva

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Electrical and photoelectrical properties of a-SICN/c-SI heterojunctions by A. V. Sukach, V. V. Tetorkin, V. I. Ivashchenko, O. K. Porada, A. O. Kozak, A. I. Tkachuk, A. T. Voroshchenko

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Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering by A. O. Kozak, V. I. Ivashchenko, O. K. Porada, L. A. Ivashchenko, O. K. Synelnychenko, S. M. Dub, O. S. Lytvyn, I. I. Tymofieieva, H. M. Tolmacheva

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