Theoretical study on laser annealing of non-stoichiometric SiOX films von O. O. Gavrylyuk

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Study of the distribution of temperature profiles in nonstoichiometric SiOx films at laser annealing von O. O. Gavrylyuk, Yu. Semchuk, O. V. Steblova, A. A. Evtukh, L. L. Fedorenko

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Study of the distribution of temperature profiles in nonstoichiometric SiOx films at laser annealing von O. O. Gavrylyuk, Yu. Semchuk, O. V. Steblova, A. A. Evtukh, L. L. Fedorenko

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Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing von O. V. Steblova, A. A. Evtukh, O. L. Bratus, L. L. Fedorenko, M. V. Voitovych, O. S. Lytvyn, O. O. Gavrylyuk, Yu. Semchuk

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