Features of investigations of multilayer nitride coatings based on Cr and Zr von O. V. Maksakova, O. D. Pogrebnjak, V. M. Beresnev

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The influence of the bias potential and working gas pressure on the properties of the ion-plasma multilayer coating TiSiN/NbN von D. V. Horokh, O. V. Maksakova, C. A. Klymenko, S. V. Lytovchenko, V. M. Beresniev, O. V. Hlukhov

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