Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist

за авторством P. M. Lytvyn, S. V. Malyuta, I. Z. Indutnyi, A. A. Efremov, O. V. Slobodyan, V. I. Minko, A. N. Nazarov, O. V. Borysov, I. V. Prokopenko
Опубліковано 2018