Study of low-pressure discharge by optical emission spectroscopy von Afanasіeva, I.A., Afanasiev, S.N., Bobkov, V.V., Gritsyna, V.V., Mahotka, I.S., Okseniuk, I.I., Shevchenko, D.I., Skrypnyk, A.O.

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Digital processing of optical emission spectra of magnetron sputtering plasma system von Afanasіeva, I.A., Afanasiev, S.N., Azarenkov, N.A., Bobkov, V.V., Gritsyna, V.V., Logachev, Yu.E., Okseniuk, I.I., Skrypnyk, A.A., Shevchenko, D.I., Chornous, V.M.

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