The effect of the deposition parameters of nitrides of high_entropy alloys (TiZrHfVNb)N on their structure, composition, mechanical and tribological properties von A. D. Pogrebnjak, I. V. Jakushchenko, G. Abadias, P. Chartier, O. V. Bondar, V. M. Beresnev, Y. Takeda, O. V. Sobol, K. Oyoshi, A. A. Andreev, B. A. Mukushev

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