Харвестер відкритої науки НАН України

Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique

von Shapovalov, A.P., Korotash, I.V., Rudenko, E.M., Sizov, F.F., Dubyna, D.S., Osipov, L.S., Polotskiy, D.Yu., Tsybrii, Z.F., Korchovyi, A.A.
Veröffentlicht in Semiconductor Physics Quantum Electronics & Optoelectronics (2015)

Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique

von Shapovalov, A.P., Korotash, I.V., Rudenko, E.M., Sizov, F.F., Dubyna, D.S., Osipov, L.S., Polotskiy, D.Yu., Tsybri, Z.F., Korchovyi, A.A.
Veröffentlicht in Semiconductor Physics Quantum Electronics & Optoelectronics (2015)