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Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique

by Shapovalov, A.P., Korotash, I.V., Rudenko, E.M., Sizov, F.F., Dubyna, D.S., Osipov, L.S., Polotskiy, D.Yu., Tsybrii, Z.F., Korchovyi, A.A.
Published in Semiconductor Physics Quantum Electronics & Optoelectronics (2015)

Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique

by Shapovalov, A.P., Korotash, I.V., Rudenko, E.M., Sizov, F.F., Dubyna, D.S., Osipov, L.S., Polotskiy, D.Yu., Tsybri, Z.F., Korchovyi, A.A.
Published in Semiconductor Physics Quantum Electronics & Optoelectronics (2015)