Bone-like coatings deposition by using of modern pulsed ion-plasma technology von Zykova, A.V., Dudin, S.V., Polozhiy, K.I.

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The energy balance of the asymmetric combined inductive-capacitive RF discharge at low pressure von Zykov, A.V., Polozhiy, K.I., Farenik, V.I.

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