Study of the process of thermal dissociation of tantal pentachloride in vacuum von Polyakov, Yu.I., Rudenkyi, S.G., Lukirsky, Yu.V., Konovalov, I.I., Rak, V.I.

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Vacuum CVD coatings Ta on target W plate of neutrons source von Borts, B.V., Neklyudov, I.M., Polyakov, Yu.I., Rudenky, S.G., Lukirsky, Yu.V., Vorobyov, I.A., Lopata, А.А.

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