Deposition of nanocrystalline silicon films into low frequency induction RF discharge von Deryzemlia, A.M., Kryshtal, P.G., Malykhin, D.G., Radchenko, V.I., Shirokov, B.M.

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A pulse transformer for a 10 MW klystron power supply von Bak, P.A., Kazarezov, I.V., Kobets, V.V., Korepanov, A.A., Krainov, G.S., Radchenko, V.I., Severilo, V.S., Tuvik, A.A.

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Hydrogen reduction of silicon tetrachloride in low temperature non-equilibrium plasma of induction RF discharge von Deryzemlia, A.N., Yevsiukov, A.I., Radchenko, V.I., Khizhnyak, D.A., Kryshtal, P.G., Zhuravlov, A.Yu., Shijan, A.V., Strigunovskiy, S.V., Pelypets, Yu.A., Shirokov, B.M.

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