Plasma etching of gallium nitride based heterostructures in production of optoelectronic devices von S. V. Dudin

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Automated system for real-time control of plasma-chemical etching process in ICP von S. V. Dudin

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Research and development of technological systems based on high-frequency induction discharge for reactive ion-plasma etching of micro- and nanostructures von S. V. Dudin

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Langmuir probe in ion-beam plasma: theory VS experiment von S. V. Dudin

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Synthesis of dielectric compounds based on a DC magnetron von O. V. Zykov, S. D. Yakovin, S. V. Dudin

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Stationary regimes of low pressure magnetron discharge von A. V. Zykov, S. V. Dudin, S. D. Jakovin

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Impedance disturbance of the inductive coil interacting with low density plasma von D. V. Rafalskij, S. V. Dudin, K. I. Polozhij

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Heuristic solution of Langmuir problem in arbitrary domain von N. A. Azarenkov, A. V. Gapon, S. V. Dudin

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Heuristic solution of Langmuir problem in arbitrary domain von N. A. Azarenkov, A. V. Gapon, S. V. Dudin

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Development of arc suppression technique for reactive magnetron sputtering von S. V. Dudin, V. I. Farenik, A. N. Dahov, J. Walkowicz

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Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals von A. V. Sagalovich, V. V. Sagalovich, S. V. Dudin, V. I. Farenik

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Ion-plasma system for reactive magnetron deposition von S. D. Yakovin, O. V. Zykov, S. V. Dudin, V. I. Farenik, M. M. Yunakov

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