Research and development of technological systems based on high-frequency induction discharge for reactive ion-plasma etching of micro- and nanostructures

за авторством S. V. Dudin
Опубліковано 2009

Plasma etching of gallium nitride based heterostructures in production of optoelectronic devices

за авторством S. V. Dudin
Опубліковано 2006

Automated system for real-time control of plasma-chemical etching process in ICP

за авторством S. V. Dudin
Опубліковано 2006

Langmuir probe in ion-beam plasma: theory VS experiment

за авторством S. V. Dudin
Опубліковано 2012

Synthesis of dielectric compounds based on a DC magnetron

за авторством O. V. Zykov, S. D. Yakovin, S. V. Dudin
Опубліковано 2009

Stationary regimes of low pressure magnetron discharge

за авторством A. V. Zykov, S. V. Dudin, S. D. Jakovin
Опубліковано 2015

Impedance disturbance of the inductive coil interacting with low density plasma

за авторством D. V. Rafalskij, S. V. Dudin, K. I. Polozhij
Опубліковано 2008

Heuristic solution of Langmuir problem in arbitrary domain

за авторством N. A. Azarenkov, A. V. Gapon, S. V. Dudin
Опубліковано 2017

Heuristic solution of Langmuir problem in arbitrary domain

за авторством N. A. Azarenkov, A. V. Gapon, S. V. Dudin
Опубліковано 2017

Development of arc suppression technique for reactive magnetron sputtering

за авторством S. V. Dudin, V. I. Farenik, A. N. Dahov, J. Walkowicz
Опубліковано 2005

Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals

за авторством A. V. Sagalovich, V. V. Sagalovich, S. V. Dudin, V. I. Farenik
Опубліковано 2014

Ion-plasma system for reactive magnetron deposition

за авторством S. D. Yakovin, O. V. Zykov, S. V. Dudin, V. I. Farenik, M. M. Yunakov
Опубліковано 2014