Deposition of the stoichiometric coatings by reactive magnetron sputtering von Sagalovych, A., Dudnik, S., Sagalovych, V.

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Experimental research of multicomponent multilayer ion-plasma avinit coatings von Sagalovych, A.V., Kononykhin, A.V., Popov, V.V., Sagalovych, V.V.

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