Gas-Phase Synthesis of Film Structures of Ni—N System von Shalaev, R.V.

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Influence of UV-radiation on structure and properties of diamond-like a-C:N films von Shalaev, R.V., Varyukhin, V.N., Prudnikov, A.M.

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Influence of intensive etching processes on structure and properties of carbon nitride films von Shalaev, R.V., Varyukhin, V.N., Prudnikov, A.M., Linnik, A.I., Zhikharev, I.V., Belousov, N.N., Raspornya, D.V., Ulyanov, A.N.

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