Showing
1 - 1
results of
1
Skip to content
Login
Language
English
Deutsch
Українська
Open Science Harvester of NAS of Ukraine
All Fields
Title
Journal Title
Author
Subject
Description
Tag
Full text
Find
Advanced
Author
Shangereeva, B. A.
Search Results - Shangereeva, B. A.
Showing
1 - 1
results of
1
Refine Results
Sort
Relevance
Date Descending
Date Ascending
Call Number
Author
Title
Email
Export
Print
bulk_save_button
select_all_on_page
Select result number 1
1
Диффузия фосфора с применением твердого планарного источника в производстве интегральных схем
by
Shangereeva, B. A.
Published 2008
Get full text
Article
standalone_record_link
Save to List
Saved in:
Email
Export
Print
bulk_save_button
select_all_on_page
Search Tools:
RSS Feed
Email Search
Related Subjects
active region
electrophysical characteristics
phosphorus diffusion
solid planar source
technological regime
transistor
активная область
диффузия фосфора,
твердый планарный источник
технологический режим
транзистор
электрофизические характеристики