Obtaining silicon carbide via chemical vapor, plasma-chemical and sublimation methods von Zhuravlov, А.Yu., Hovanskiy, N.А., Khizhnyak, D.A., Shirokov, B.M., Semenov, N.A., Shijan, А.V., Strigunovskiy, S.V., Yevsiukov, A.I., Shevtsov, A.B., Nazarenko, E.A., Pilipenko, N.N.

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