Digital identification of the emission spectrum lines of magnetron discharge von Afanasіeva, I.A., Afanasiev, S.N., Bobkov, V.V., Gritsyna, V.V., Drozdov, D.R., Logachev, Yu.E., Skrypnyk, A.A., Shevchenko, D.I.

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Digital processing of optical emission spectra of magnetron sputtering plasma system von Afanasіeva, I.A., Afanasiev, S.N., Azarenkov, N.A., Bobkov, V.V., Gritsyna, V.V., Logachev, Yu.E., Okseniuk, I.I., Skrypnyk, A.A., Shevchenko, D.I., Chornous, V.M.

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