Hydrogen reduction of silicon tetrachloride in low temperature non-equilibrium plasma of induction RF discharge

за авторством Deryzemlia, A.N., Yevsiukov, A.I., Radchenko, V.I., Khizhnyak, D.A., Kryshtal, P.G., Zhuravlov, A.Yu., Shijan, A.V., Strigunovskiy, S.V., Pelypets, Yu.A., Shirokov, B.M.
Опубліковано 2019

Obtaining silicon carbide via chemical vapor, plasma-chemical and sublimation methods

за авторством Zhuravlov, А.Yu., Hovanskiy, N.А., Khizhnyak, D.A., Shirokov, B.M., Semenov, N.A., Shijan, А.V., Strigunovskiy, S.V., Yevsiukov, A.I., Shevtsov, A.B., Nazarenko, E.A., Pilipenko, N.N.
Опубліковано 2017