Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique

за авторством Shapovalov, A.P., Korotash, I.V., Rudenko, E.M., Sizov, F.F., Dubyna, D.S., Osipov, L.S., Polotskiy, D.Yu., Tsybri, Z.F., Korchovyi, A.A.
Опубліковано 2015