Hydrogen gettering in annealed oxygen-implanted silicon von Misiuk, A., Barcz, A., Ulyashin, A., Antonova, I.V., Prujszczyk, M.

Volltext

Defects in high temperature and high pressure processed Si:N revealed by deuterium plasma treatment von Misiuk, A., Barcz, A., Ulyashin, A., Prujszczyk, M., Bak-Misiuk, J., Formanek, P.

Volltext