Education of sludge particles and wear particles polishing powder in the polishing process nitride aluminum by Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin

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Precision shaping flat surfaces details of optics and microelectronics when polishing by Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin, A. G. Vetrov

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Formation and localization of deposit from wear of polishing powder nanoparticles on treated surface during polishing of polymer optical materials by Yu. D. Filatov, V. I. Sidorko, S. V. Kovalev, A. Y. Boyarintsev, V. A. Kovalev, O. Y. Yurchyshyn

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