Education of sludge particles and wear particles polishing powder in the polishing process nitride aluminum

за авторством Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin
Опубліковано 2017

Precision shaping flat surfaces details of optics and microelectronics when polishing

за авторством Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin, A. G. Vetrov
Опубліковано 2016