Education of sludge particles and wear particles polishing powder in the polishing process nitride aluminum von Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin

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Precision shaping flat surfaces details of optics and microelectronics when polishing von Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin, A. G. Vetrov

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Formation and localization of deposit from wear of polishing powder nanoparticles on treated surface during polishing of polymer optical materials von Yu. D. Filatov, V. I. Sidorko, S. V. Kovalev, A. Y. Boyarintsev, V. A. Kovalev, O. Y. Yurchyshyn

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