High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching by V. I. Farenik

Get full text

Receipt and transportation of ion beams of low and average energy by V. I. Farenik

Get full text

Low Energy-intensive plasma systems with discharges in combined electric and magnetic fields by V. I. Farenik

Get full text

Development of plasma methods for the synthesis of fullerenes by V. G. Udovitskij, Ju. Kropotov, V. I. Farenik

Get full text

Development of arc suppression technique for reactive magnetron sputtering by S. V. Dudin, V. I. Farenik, A. N. Dahov, J. Walkowicz

Get full text

Formation of neutral atomic beam for dry etching and study its charachteristics by A. V. Voznyj, Dzh. Ju. Jam, Ju. Kropotov, V. I. Farenik

Get full text

Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals by A. V. Sagalovich, V. V. Sagalovich, S. V. Dudin, V. I. Farenik

Get full text

Ion-plasma system for reactive magnetron deposition by S. D. Yakovin, O. V. Zykov, S. V. Dudin, V. I. Farenik, M. M. Yunakov

Get full text

The educational-scientific complexes in the field of high technologies by N. A. Azarenkov, A. V. Zykova, V. F. Klepikov, V. I. Lapshin, V. I. Farenik

Get full text

Nanocrystalline and nanocomposite coverings, structure, properties by V. M. Beresnev, A. D. Pogrebnjak, N. A. Azarenkov, V. I. Farenik, G. V. Kirik

Get full text

Nanoscience and nanotechnologies: modern achievements, perspectives, developing problems and tasks by N. A. Azarenkov, V. D. Orlov, N. I. Slipchenko, V. G. Udovitskij, V. I. Farenik

Get full text

Training and training in the field of nanotechnology and the use of at the same time, the scientific heritage by N. A. Azarenkov, V. D. Orlov, N. I. Slipchenko, V. G. Udovitskij, V. I. Farenik

Get full text