High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching von V. I. Farenik

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Receipt and transportation of ion beams of low and average energy von V. I. Farenik

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Low Energy-intensive plasma systems with discharges in combined electric and magnetic fields von V. I. Farenik

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Development of plasma methods for the synthesis of fullerenes von V. G. Udovitskij, Ju. Kropotov, V. I. Farenik

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Development of arc suppression technique for reactive magnetron sputtering von S. V. Dudin, V. I. Farenik, A. N. Dahov, J. Walkowicz

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Formation of neutral atomic beam for dry etching and study its charachteristics von A. V. Voznyj, Dzh. Ju. Jam, Ju. Kropotov, V. I. Farenik

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Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals von A. V. Sagalovich, V. V. Sagalovich, S. V. Dudin, V. I. Farenik

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Ion-plasma system for reactive magnetron deposition von S. D. Yakovin, O. V. Zykov, S. V. Dudin, V. I. Farenik, M. M. Yunakov

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The educational-scientific complexes in the field of high technologies von N. A. Azarenkov, A. V. Zykova, V. F. Klepikov, V. I. Lapshin, V. I. Farenik

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Nanocrystalline and nanocomposite coverings, structure, properties von V. M. Beresnev, A. D. Pogrebnjak, N. A. Azarenkov, V. I. Farenik, G. V. Kirik

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Nanoscience and nanotechnologies: modern achievements, perspectives, developing problems and tasks von N. A. Azarenkov, V. D. Orlov, N. I. Slipchenko, V. G. Udovitskij, V. I. Farenik

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Training and training in the field of nanotechnology and the use of at the same time, the scientific heritage von N. A. Azarenkov, V. D. Orlov, N. I. Slipchenko, V. G. Udovitskij, V. I. Farenik

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