High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching за авторством V. I. Farenik

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Receipt and transportation of ion beams of low and average energy за авторством V. I. Farenik

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Low Energy-intensive plasma systems with discharges in combined electric and magnetic fields за авторством V. I. Farenik

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Development of plasma methods for the synthesis of fullerenes за авторством V. G. Udovitskij, Ju. Kropotov, V. I. Farenik

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Development of arc suppression technique for reactive magnetron sputtering за авторством S. V. Dudin, V. I. Farenik, A. N. Dahov, J. Walkowicz

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Formation of neutral atomic beam for dry etching and study its charachteristics за авторством A. V. Voznyj, Dzh. Ju. Jam, Ju. Kropotov, V. I. Farenik

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Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals за авторством A. V. Sagalovich, V. V. Sagalovich, S. V. Dudin, V. I. Farenik

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Ion-plasma system for reactive magnetron deposition за авторством S. D. Yakovin, O. V. Zykov, S. V. Dudin, V. I. Farenik, M. M. Yunakov

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The educational-scientific complexes in the field of high technologies за авторством N. A. Azarenkov, A. V. Zykova, V. F. Klepikov, V. I. Lapshin, V. I. Farenik

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Nanocrystalline and nanocomposite coverings, structure, properties за авторством V. M. Beresnev, A. D. Pogrebnjak, N. A. Azarenkov, V. I. Farenik, G. V. Kirik

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Nanoscience and nanotechnologies: modern achievements, perspectives, developing problems and tasks за авторством N. A. Azarenkov, V. D. Orlov, N. I. Slipchenko, V. G. Udovitskij, V. I. Farenik

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Training and training in the field of nanotechnology and the use of at the same time, the scientific heritage за авторством N. A. Azarenkov, V. D. Orlov, N. I. Slipchenko, V. G. Udovitskij, V. I. Farenik

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